Desorption Gas Analyzer - メーカー・企業と製品の一覧

[Analysis Case] Thermal Desorption Gas Analysis of SiN Film by TDS

It is possible to evaluate the surface-adsorbed gas on the thin film and the desorbed gas from within the film.

The TDS analysis results regarding the SiN film on the Si substrate are presented. In the low-temperature range up to around 100°C, there is little desorption, indicating that there were few adsorbed components on the surface of the sample. On the other hand, as the temperature of the sample increases, it can be observed that m/z 2 (H2), m/z 18 (H2O), and m/z 27 (C2H3: organic fragment components) are being desorbed. TDS analysis conducted under high vacuum (1E-7 Pa) is effective for evaluating the adsorbed gas components on the film surface and trace gas components within the film.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis

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[Analysis Case] TDS Analysis of Glass Samples

It is possible to analyze desorbed gases by temperature increase even with transparent samples that allow infrared rays to pass through.

The temperature-programmed desorption gas analysis method (TDS) is a mass spectrometry technique that directly heats a sample by irradiating it with infrared light and monitors the gases generated at each temperature. When analyzing samples that cannot absorb infrared light, such as glass substrates, it is possible to conduct the analysis by changing the sample stage from transparent to black. The black stage absorbs infrared light, raising its temperature, which in turn increases the temperature of the sample through thermal conduction, generating gases.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis

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[Analysis Case] Thermal Desorption Gas Analysis of Organic Films (TDS)

It is possible to evaluate the outgassing components of organic matter in a vacuum environment.

TDS is a method that heats samples in a vacuum environment and monitors the gases that are released. When measuring organic substances, it can be difficult to obtain accurate measurements due to contamination of the equipment from large amounts of gas release. However, by adjusting the sample amount and analysis conditions in advance to control the amount of gas released, analysis becomes possible. Below are the results of TDS analysis conducted on organic films. We were able to capture the phenomenon where surface-adsorbed water is released at low temperatures, and the intensity of gas release increases with rising temperature.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis

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Examples of TDS analysis by representative materials and purposes

TDS: Thermal Desorption Gas Analysis Method

TDS is a method that heats samples in high vacuum (1E-7 Pa) and detects the gases that are released. By heating the sample at a constant rate in high vacuum, it is possible to confirm the temperature dependence of even trace amounts of desorption (at the monolayer level). Additionally, for some components, it is also possible to calculate the number of molecules of the desorbed gas. We will introduce examples of TDS applied to representative materials.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis

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[Analysis Case] Corrosive Gas Analysis by TDS

You can check for gases that have a negative impact on the product.

Corrosive gases such as etching gases have a significant impact on the degradation of semiconductors, electronic components, and devices. Below, we present an example of capturing corrosive gases using TDS (Temperature-Programmed Desorption Gas Analysis). It was confirmed that HCl, a corrosive gas, desorbs with the increase in temperature of the sample. Since TDS can capture desorption in the m/z range of 2 to 199 while heating, it is effective for investigating the types and amounts of corrosive gases as well as their temperature dependence of desorption.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis

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[Analysis Case] Analysis of Hydrogen Desorption from Stainless Steel by TDS

It is possible to evaluate the amount of hydrogen released from metals using TDS (Thermogravimetric Desorption Gas Analysis).

Many metallic materials, such as steel, are known to deteriorate (hydrogen embrittlement) due to diffusible hydrogen that diffuses within the crystal lattice at room temperature. This time, we present an example of evaluating the amount of hydrogen desorption from stainless steel plates (SUS316L) with added hydrogen using TDS. A desorption peak, thought to be diffusible hydrogen, was observed in the low-temperature range around 150°C.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis
Other metal materials
Steel

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[Analysis Case] Simultaneous Heating Analysis of Copper Plates and Solder by TDS

It is possible to evaluate degassing in an environment close to the actual process by bringing the materials into contact with each other.

Soldering of metals is one of the essential processes in the field of electronics. It is known that the outgassing that occurs when metal and solder are heated in contact can lead to voids. Below, we introduce a case where TDS analysis (Thermal Desorption Spectroscopy) was performed with solder placed on a copper plate. TDS can evaluate the outgassing associated with the heating of materials. By bringing the copper plate and solder into contact and heating them simultaneously within the TDS apparatus, we were able to capture outgassing in an environment close to the actual process.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis
Non-ferrous metals
Solder

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[TDS] Thermal Desorption Gas Analysis Method

A mass spectrometry method that allows monitoring of gases generated by vacuum heating/warming at different temperatures, with high sensitivity for detecting hydrogen and water.

TDS is a mass spectrometry method that allows monitoring of gases generated by vacuum heating/ramping at different temperatures. The TDS spectrum represents temperature on the horizontal axis and ion intensity on the vertical axis. This enables comparison of the amount of gas released and the desorption temperatures. Additionally, due to the vacuum environment, hydrogen and water can be analyzed with high sensitivity. - It is possible to understand the relationship between the gases desorbed from the sample, the pressure, and the temperature at which they are generated. - Since only the sample can be heated, the background is low, allowing for high-sensitivity analysis of low-mass molecules such as hydrogen, water, oxygen, and nitrogen. - It is possible to estimate the composition of the gases generated from the sample and perform quantitative analysis (counting the number of molecules).

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis
Other contract services
Circuit board design and manufacturing

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[Analysis Case] Thermal Desorption Gas Analysis of Metal (Sn)

TDS analysis of low melting point metals

Sn is used as the main raw material for solder, which is also used in semiconductor manufacturing. The gases in the solder can cause void formation, so it is important to control the amount of encapsulated gas in the solder and its main raw material, Sn. The results of investigating the gases released by heating Sn to a temperature above its melting point using TDS analysis are shown below. By heating the sample above its melting point, it is possible to evaluate the surface-adsorbed components and the components of the encapsulated gas in the sample.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

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[Analysis Case] Degassing Evaluation of Plating Samples

Thermal Desorption Gas Analysis of Ni/Au Plating (TDS)

If the plating film contains gas, it may cause defects such as peeling, blistering, and bubbles within the film. To investigate the gas contained in the plating film, TDS, which can measure the gas released by heating the sample in a high vacuum, is effective. The results of TDS analysis on a sample with Ni/Au plating on SUS material are presented. The release of H2, HCN, H2S, and HCl from the plating film was confirmed. Additionally, quantitative values were calculated.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

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[Analysis Case] Evaluation of Organic Component Desorption in a Vacuum

The temperature dependence evaluation of the desorption of specific organic components is possible through composite analysis.

TDS (Thermal Desorption Gas Analysis) is a method that allows for the confirmation of desorbed components and desorption temperatures while heating a sample in a vacuum (1E-7 Pa). Furthermore, by combining the results of TDS with GC/MS (Gas Chromatography-Mass Spectrometry), which can identify organic substances, it is possible to evaluate the desorption temperatures of specific desorbed components in a vacuum. Below, we present an example of a combined analysis of TDS and GC/MS conducted on graphene.

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis
Secondary Cells/Batteries
LCD display

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[Analysis Case] Analysis of α-Alumina (α-Al2O3) by TDS

Thermal desorption gas analysis of ceramics

Thermally stable α-alumina is used in a wide range of applications, including heat-resistant materials, semiconductor packages, and components of semiconductor manufacturing equipment. Among these, dense α-alumina is also used as a material for vacuum devices. However, the gases generated when such materials are heated can adversely affect products and equipment, making it important to understand the outgassing from these materials. In this report, we present a case study comparing the outgassing amounts of porous and dense α-alumina using TDS analysis (temperature-programmed desorption gas analysis).

企業：一般財団法人材料科学技術振興財団　MST
価格：Other

Contract Analysis
Contract measurement

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Thermogravimetric Analysis of Evolved Gases (TDS)

By using infrared heating, it is possible to heat only the sample, allowing for a lower background!

We would like to introduce our "Thermal Desorption Gas Analysis (TDS)." By understanding the gases emitted from materials and components, it is possible to confirm surface contaminants, verify process improvement measures, and estimate the causes of defects. In Thermal Desorption Gas Analysis (TDS), when the sample is heated in a vacuum, we can identify the types of gases emitted from the surface and interior (qualitative analysis) and perform semi-quantitative analysis of the gas volume. 【Features】 ■ Sample size: Up to 10mm x 10mm and 4mm (thickness) ■ Sample heating atmosphere: High vacuum (10^-7 Pa) ■ Temperature - Room temperature to 1,400℃ (sample stage temperature) - Room temperature to approximately 1,150℃ (Si substrate calibration temperature*) * High-precision temperature correction is performed using embedded thermocouples. * For more details, please download the PDF or feel free to contact us.

企業：東芝ナノアナリシス
価格：Other

Other analysis and evaluation services

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Desorption Gas Analyzer - メーカー・企業と製品の一覧

Desorption Gas Analyzerの製品一覧